Original title: Surface roughness and resistivity of thin films
Authors: Franc, J. ; Novotný, Jan
Document type: Papers
Conference/Event: Applied Electronics 2002, Pilsen (CZ), 2002-09-11 / 2002-09-12
Year: 2002
Language: eng
Abstract: Surface finish of alumina thin film substrates was measured with stylus profilometer. A connection between the obtained values of Ra and the thin film resistance was studied. No correlation can be found owing to big stylus radius and computation method used in profilometer.
Keywords: surface contamination; surface treatment; thin films resistors
Project no.: CEZ:AV0Z2067918 (CEP), KSK1010104 Projekt 04/01:4046 (CEP)
Funding provider: GA AV ČR
Host item entry: Applied Electronics 2002

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0114169

Permalink: http://www.nusl.cz/ntk/nusl-32506


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers