Studium interakce Pd a Pt s oxidy cínu a ceru

Kúš, Peter

1 is a suitable material for thin-film gas sensors. Higher sensitivity could be achieved by platinum dopping of the layer. This work focuses on the optimalization of and thin film preparation by radio-frequency magnetron sputtering method. Subsequent analysis by means of XPS, AFM, SEM and XRD was carried out to determine physicochemical attributes of resulting layers. It appears that after the deposition, platinum within the layer is present in the metalic , as well as in the mixed chemical state. After the annealing process mixed state dominates over metalic state and after additional annealing platinum is present solely in oxidized form. Sensory response of layers for presence of hydrogen were examined on two different chip platforms (glass with chromium contacts and sapphire with platinum contacts). Contrary to expectations, the platinum dopped layers performed worse in comparison to the pure tin dioxide layers. This could be explained by the fact, that after annealing platinum within the layer was present mainly in the non-metalic form. Both and layers were more sensitive on sapphire platform, which could be associated with the crystal structure formed on its surface or with presence of metalic contacts.

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