Original title: Automatizace epitaxního růstu polovodičových heterostruktur
Translated title: Automation of LPE growth of semiconductor heterostructures
Authors: Novotný, Jan ; Kostka, František ; Leba, P. ; Poupa, M.
Document type: Papers
Conference/Event: Aplikovaná elektronika'98, Plzeň (CZ), 1998-09-09 / 1998-09-10
Year: 1998
Language: cze
Keywords: automation; liquid phase epitaxial growth; semiconductors
Project no.: GA102/96/1238 (CEP)
Funding provider: GA ČR
Host item entry: Aplikovaná elektronika'98. Sborník referátů mezinárodní vědecké konference

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0113518

Permalink: http://www.nusl.cz/ntk/nusl-32357


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers