Original title: Simultaneous measurement of composition and thickness of quaternarycompound films by EPMA
Authors: Starý, V. ; Procházková, Olga ; Jurek, Karel ; Kohout, Jindřich
Document type: Papers
Conference/Event: NANO'94, Brno (CZ), 1994-08-29 / 1994-08-30
Year: 1994
Language: eng
Keywords: measurement; thin films
Project no.: 102/93/0642
Funding provider: GA ČR
Host item entry: Nanometrology Scanning Probe Microscopy and Related Techniques

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0112989

Permalink: http://www.nusl.cz/ntk/nusl-32204


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers