Original title: Control and monitoring of a modulation depth of interferometrically fabricated photoresist grating structures
Authors: Koudela, Ivo ; Miler, Miroslav ; Skalský, Miroslav
Document type: Papers
Conference/Event: NANO'94, Brno (CZ), 1994-08-29 / 1994-08-30
Year: 1994
Language: eng
Keywords: diffraction gratings; laser beams; photoresists
Project no.: 267405/94
Funding provider: GA AV
Host item entry: Nanometrology Scanning Probe Microscopy and Related Techniques

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0112979

Permalink: http://www.nusl.cz/ntk/nusl-32199


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers