Original title: Scanning electron microscopy with low energy electrons
Authors: Mika, Filip
Document type: Papers
Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year: 2003
Language: eng
Abstract: A method of scanning electron microscopy (SEM) of nonconductive specimens, based on measurement and utilisation of the critical energy of electron impact, is described in detail together with examples of its applications. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the base of measurement of the time development in the image signal from beginning of irradiation. The method is programmed and implemented as a module to the controlling software of the microscope type VEGA, where it secures fast search for the critical energy value.
Keywords: critical energy; nonconductors; scanning electron microscopy
Project no.: CEZ:AV0Z2065902 (CEP), KJB2065301 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101281

Permalink: http://www.nusl.cz/ntk/nusl-29599


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers