Original title: Auger electron spectro-microscopy
Authors: Hrnčiřík, Petr
Document type: Papers
Conference/Event: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Year: 2003
Language: eng
Abstract: The short escape depth of Auger electrons, the high lateral resolution, the chemical information about superficial elemental composition and the possibility of measuring the indepth distribution of elements (with utilisation of the ion sputtering) are the main advantages of the Auger electron spectroscopy (AES). When combined with the scanning electron miscroscope, AES can provide with image signal suitable for spectro-micrographs showing distribution of elements over the surface, i.e. the chemical mapping. This mapping can be advantageously compared with other SEM image signals in order to faciliate their interpretation.
Keywords: Auger electron analyser; Auger electrons; signal intensity
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101280

Permalink: http://www.nusl.cz/ntk/nusl-29598


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers