Název:
Auger electron spectro-microscopy
Autoři:
Hrnčiřík, Petr Typ dokumentu: Příspěvky z konference Konference/Akce: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Rok:
2003
Jazyk:
eng
Abstrakt: The short escape depth of Auger electrons, the high lateral resolution, the chemical information about superficial elemental composition and the possibility of measuring the indepth distribution of elements (with utilisation of the ion sputtering) are the main advantages of the Auger electron spectroscopy (AES). When combined with the scanning electron miscroscope, AES can provide with image signal suitable for spectro-micrographs showing distribution of elements over the surface, i.e. the chemical mapping. This mapping can be advantageously compared with other SEM image signals in order to faciliate their interpretation.
Klíčová slova:
Auger electron analyser; Auger electrons; signal intensity Číslo projektu: CEZ:AV0Z2065902 (CEP) Zdrojový dokument: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0101280