Název:
Collection solid angle of backscattered electrons in environmental scanning electron microscopy
Autoři:
Wandrol, Petr Typ dokumentu: Příspěvky z konference Konference/Akce: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Rok:
2003
Jazyk:
eng
Abstrakt: This paper deals with an influence of the collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The collection solid angle was changed by application of aluminium masks mounted on the scintillator. As a working environment in the specimen chamber air and saturated water steam were used.
Klíčová slova:
elektronová mikroskopie; backscattered; electron microscopy; environmental Číslo projektu: GA102/01/1271 (CEP), IBS2065107 (CEP), CEZ:AV0Z2065902 (CEP) Poskytovatel projektu: GA ČR, GA AV ČR Zdrojový dokument: Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students, ISBN 80-214-2379-X
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0101279