Original title: Optoelectronic pressure sensor with Si.sub.3./sub.N.sub.4./sub. diaphragm
Authors: Beneš, P. ; Matějka, František ; Vrba, R. ; Kolařík, V.
Document type: Papers
Conference/Event: ICPR, Praha (CZ), 2001-07-29 / 2001-08-03
Year: 2001
Language: eng
Abstract: Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into the deformation of a thick layer nitride membrane. Nitride membrane creates a mirror for laser beam and moves with reflected laser mark. Its position is sensed via a position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip provides an IEEE 1451.2 interface.
Keywords: nitride membrane; optoelectronic; pressure
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: 16th international conference on production research, ISBN 80-02-01438-3

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101224

Permalink: http://www.nusl.cz/ntk/nusl-29588


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers