Original title:
Optoelectronic pressure sensor with Si.sub.3./sub.N.sub.4./sub. diaphragm
Authors:
Beneš, P. ; Matějka, František ; Vrba, R. ; Kolařík, V. Document type: Papers Conference/Event: ICPR, Praha (CZ), 2001-07-29 / 2001-08-03
Year:
2001
Language:
eng Abstract:
Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into the deformation of a thick layer nitride membrane. Nitride membrane creates a mirror for laser beam and moves with reflected laser mark. Its position is sensed via a position sensing device - photo lateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip provides an IEEE 1451.2 interface.
Keywords:
nitride membrane; optoelectronic; pressure Project no.: CEZ:AV0Z2065902 (CEP) Host item entry: 16th international conference on production research, ISBN 80-02-01438-3
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0101224