Original title: Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons
Authors: Hrnčiřík, Petr ; Müllerová, Ilona
Document type: Papers
Conference/Event: EEICT 2002, Brno (CZ), 2002-04-25
Year: 2002
Language: eng
Abstract: The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system was extensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparable performance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so that these two methods can be in situ compared.
Keywords: scanning electron microscope; surface analysis; ultrahighvacuum
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of 8.sup.th./sup. conference EEICT 2002

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101196

Permalink: http://www.nusl.cz/ntk/nusl-29568


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