Original title: Acquisition of multi-dimensional image in the scanning electron microscope
Authors: Horáček, Miroslav
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: The possibilities of acquisition of the energy spectrum of signal electrons or angular distribution for every point of the scanning matrix on the specimen in SEM were studied and suitable fast position sensitive detector was designed.
Keywords: angular distribution; signal electrons
Project no.: CEZ:AV0Z2065902 (CEP), GA102/00/P001 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101119

Permalink: http://www.nusl.cz/ntk/nusl-29552


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers