Original title: Calculation of the beam profile
Authors: Oral, Martin
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: The beam profile provides local current density distribution of a particle beam. From the known distribution we can optimize the axial position of the specimen in a SEM, understand image aberrations or find optimum function of electron or ion analyzers. Graphical plot of the profile as a function of the z coordinate shows what is happening with the beam when it passes through the optical system. The first attempts of graphical presentationof the beam aberrations and profiles based on aberration theory are discussed in the recent diploma thesis.
Keywords: aberration theory; beam aberrations; particle beam
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101115

Permalink: http://www.nusl.cz/ntk/nusl-29548


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