Original title: Misalignment aberrations
Authors: Dvořák, David
Document type: Papers
Conference/Event: Recent trends in charged particle optics and surface physics instrumentation, Skalský dvůr (CZ), 2002-07-08 / 2002-07-12
Year: 2002
Language: eng
Abstract: Misalignment aberrations arise from (small) imperfections of lens geometry - either because of the inaccuracy in the manufacturing of individual elements (like electrodes and/or pole-piece defects) or the misalignment of the optical elements in the system (tilted of shifted element). Under suchcircumstances the ideal symmetry is disturbed and additional parasitic fields are produced. In the effect they are producing additional image aberrations.
Keywords: misalignment aberrations; optical elements
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr, ISBN 80-238-8986-9

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101114

Permalink: http://www.nusl.cz/ntk/nusl-29547


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers