Název: Test Specimens for SEM
Autoři: Matějka, František ; Ryzí, Z.
Typ dokumentu: Příspěvky z konference
Konference/Akce: EUREM /12./ - European Congress on Electron Microscopy, Brno (CZ), 2000-07-09 / 2000-07-14
Rok: 2000
Jazyk: eng
Abstrakt: In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have an advantage: their geometry and dimensions are determined with high precision. Another advantage may be that the test pattern can be created from materials with well known properties. In our laboratories we prepare test specimens using electron-beam lithography and the anisotropic etching of silicon and using holographic techniques. We have designed the topography of anisotropically etched measuring test specimen ".mu.-scale".In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have an advantage: their geometry and dimensions are determined with high precision. Another advantage may be that the test pattern can be created from materials with well known properties. In our laboratories we prepare test specimens using electron-beam lithography and the anisotropic etching of silicon and using holographic techniques. We have designed the topography of anisotropically etched measuring test specimen ".mu.-scale".
Číslo projektu: CEZ:AV0Z2065902 (CEP), IBS2065014 (CEP)
Poskytovatel projektu: GA AV ČR
Zdrojový dokument: Proceedings of the 12th European Congress on Electron Microscopy, ISBN 80-238-5503-4
Poznámka: Související webová stránka: mailto:mat@isibrno.cz

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0100870

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-29472


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference