Original title: Scanning low and very low energy electron microscopy
Authors: Müllerová, Ilona ; Frank, Luděk
Document type: Papers
Conference/Event: EUREM /12./ - European Congress on Electron Microscopy, Brno (CZ), 2000-07-09 / 2000-07-14
Year: 2000
Language: eng
Abstract: The main aspects of the SEM performed in the low energy (below 5 keV) and very low energy (below 50 to 100 eV) ranges are briefly summarised. They include the necessity to vary the beam energy along the column, in order to suppress the energy dependence of the resolution, and to tune the compromise between the resolution and the field on the specimen surface. Applications under "normal" vacuum conditions are mentioned.
Project no.: CEZ:AV0Z2065902 (CEP), IAA1065901 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 12th European Congress on Electron Microscopy, ISBN 80-238-5503-4
Note: Související webová stránka: mailto:ilona@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100861

Permalink: http://www.nusl.cz/ntk/nusl-29463


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