Original title:
ELito Project - New Ways in Electron-Beam Lithography
Authors:
Matějka, František ; Kolařík, V. Document type: Papers Conference/Event: EDS '98 /5./ - Electronic Devices and Systems Conference, Brno (CZ), 1998-06-11 / 1998-06-12
Year:
1998
Language:
eng Project no.: GA102/97/1145 (CEP) Funding provider: GA ČR Host item entry: Proceedings of the 5th Electronic Devices and Systems Conference 1998, ISBN 80-214-1198-8
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0100632