Original title:
Noncharging Microscopy of Semiconductor Structures
Authors:
Hutař, Otakar Document type: Papers Conference/Event: Recent Trends /6./ in Charged Particle Optics and Surface Physics Instrumentation, Skalský Dvůr (CZ), 1998-06-29 / 1998-07-03
Year:
1998
Language:
eng Project no.: IAA2065703 (CEP) Funding provider: GA AV ČR Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation - 6th Seminar, ISBN 80-238-2333-7
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0100601