Original title:
Binary diffraction structures fabricated on a silicon nitride membrane
Authors:
Myšková, M. ; Matějka, František Document type: Papers Conference/Event: EDS '96 - Electronic Devices and Systems Conference, Brno (CZ), 1996-06-25
Year:
1996
Language:
eng Host item entry: Proceedings of Electronic Devices and Systems Conference 1996, ISBN 80-214-0767-8
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0100441