Original title: Masks for optical lithography of Josephson's bridges prepared by electron beam lithography
Authors: Matějková, Jiřina ; Matějka, František
Document type: Papers
Conference/Event: EDS '93 - Electronic Devices and Systems Seminar, (CZ), 1993-11-09
Year: 1993
Language: eng
Host item entry: Proceedings of the Seminar on Electronic Devices and Systems '93

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0100171

Permalink: http://www.nusl.cz/ntk/nusl-29305


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers