Home > Conference materials > Papers > Ion beam assisted deposition of thin films - the role of ion beam bombardment in modification of thin film characteristics and properties
Original title:
Ion beam assisted deposition of thin films - the role of ion beam bombardment in modification of thin film characteristics and properties
Authors:
Šikola, T. ; Spousta, J. ; Dittrichová, L. ; Beneš, L. ; Peřina, Vratislav ; Matějka, F. Document type: Papers Conference/Event: International Conference on Communication, Signals and Systems, Brno (CZ), 1996-09-10 / 1996-09-12
Year:
1996
Language:
eng Project no.: KSK1010601 (CEP) Funding provider: GA AV ČR Host item entry: Proceedings of International Conference on Communication, Signals and Systems (CSS 96), ISBN 80-214-0768-9
Institution: Nuclear Physics Institute AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0080270