Original title: Diamond growth on silicon and WC-Co by microwave plasma chemical vapor deposition
Authors: Frgala, Z. ; Kudrle, V. ; Janča, J. ; Buršíková, V. ; Vašina, P. ; Meško, M. ; Buršík, Jiří ; Kadlečíková, M. ; Klapetek, P.
Document type: Papers
Conference/Event: Annual conference of doctoral students /12./, Praha (CZ), 2003-06-10 / 2003-06-13
Year: 2003
Language: eng
Abstract: We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapor deposition.We observed the interesting time dependence of the negative bias voltage during nucleation stage which is useful for nucleation process monitoring. The layers were analysed by Raman spectroscopy, scanning electron microscopy and atomic force microscopy.
Keywords: CVD; diamond; microscopy
Project no.: CEZ:AV0Z2041904 (CEP), IBS2041105 (CEP)
Funding provider: GA AV ČR
Host item entry: WDS'03 Proceedings of contributed papers, ISBN 80-86732-18-5

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0075012

Permalink: http://www.nusl.cz/ntk/nusl-26591


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Research > Institutes ASCR > Institute of Physics of Materials
Conference materials > Papers