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Original title:
Correction of misalignment aberrations of a hexapole corrector using the differential algebra method
Authors: Radlička, Tomáš ; Oral, Martin
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energy\nTEM or STEM, where the corrector system enables reaching the atomic resolution. On the other\nhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,\noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.
Keywords: electron microscopy; Schertzer theorem; STEM; TEM
Project no.: LO1212 (CEP), ED0017/01/01, 7H13015 (CEP)
Funding provider: GA MŠk, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260342
Permalink: http://www.nusl.cz/ntk/nusl-253630
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Radlička, Tomáš ; Oral, Martin
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energy\nTEM or STEM, where the corrector system enables reaching the atomic resolution. On the other\nhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,\noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.
Keywords: electron microscopy; Schertzer theorem; STEM; TEM
Project no.: LO1212 (CEP), ED0017/01/01, 7H13015 (CEP)
Funding provider: GA MŠk, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260342
Permalink: http://www.nusl.cz/ntk/nusl-253630
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2016-07-19, last modified 2022-09-29