Original title: New detectors for low-energy BSE
Authors: Lalinský, Ondřej ; Schauer, Petr ; Kučera, M. ; Hanuš, M. ; Lučeničová, Z.
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Backscattered electrons (BSE) are mostly used to study the specimen’s topography. Nowadays, low energy (units of keV) electron beam imaging is often necessary for example for the research of nanomaterials, biomaterials or semiconductors. Because BSE detectors are mostly non-accelerating or low-accelerating, electrons with approximately the same energy as primary beam (PB) have to be detected. Therefore, BSE detectors need to become optimized for such low-energy electrons. For the scintillation detectors, the biggest problem probably lies in the scintillator. Semiconductor detectors aren’t studied in this work. Cerium activated bulk single crystals of yttrium aluminium garnet (YAG:Ce)Ce(X):Y(3-X)Al(5)O(12) are widely used as scintillators for the detection of high-energy backscattered electrons (BSE). However, commonly used YAG:Ce single crystal strongly loses its light yield (LY) with the decrease of the PB energy. As possible available alternatives for this application, bulk single crystals of yttrium aluminium perovskite (YAP:Ce) Ce(x)Y(1-X)AlO(3) and CRY018 can be predicted. However, similar LY drop can be expected also with these scintillators.
Keywords: BSE detector; cathodoluminescence; low-energy electron; scintillator
Project no.: TE01020118 (CEP), GA16-05631S (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA ČR, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260336

Permalink: http://www.nusl.cz/ntk/nusl-253624


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