Original title: Study of RF discharge properties for hybrid pulsed laser deposition
Authors: Novotný, M. ; Jelínek, Miroslav ; Bulíř, Jiří ; Zelinger, Zdeněk ; Lančok, Ján
Document type: Papers
Conference/Event: Workshop 2001, Praha (CZ), 2001-02-00
Year: 2001
Language: eng
Abstract: We have created CN.sub.x layers by pulsed laser deposition (PLD) using graphite target in N./sub.2 ambient and KrF excimer laser. We have found that active nitrogen plays an important role in this task. We have studied the influence of various RF parameters on the activation of nitrogen by optical emission spectroscopy.
Keywords: activation of nitrogen; CN.sub.2./sub.; pulsed laser deposition
Project no.: CEZ:AV0Z1010914 (CEP), IAA1010110 (CEP), LN00A015 (CEP)
Funding provider: GA AV ČR, GA MŠk
Host item entry: Proceedings of Workshop 2001

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0031434

Permalink: http://www.nusl.cz/ntk/nusl-21842


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers