Original title: A Comparison of Different Measurement Method of Mechanical Properties of Al Thin Film
Authors: Truhlář, M. ; Buršíková, V. ; Sobota, Jaroslav ; Kruml, Tomáš
Document type: Papers
Conference/Event: NANOCON 2014. International Conference /6./, Brno (CZ), 2014-11-05 / 2014-11-07
Year: 2014
Language: eng
Abstract: The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of a small cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films – AlCuW, AlCuSi with thickness 2 .mu.m and grain size 3.8 .mu.m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.
Keywords: mechanical properties; microcompression; nanoindentation; Young moduls
Project no.: LO1212 (CEP), ED0017/01/01
Funding provider: GA MŠk, GA MŠk
Host item entry: NANOCON 2014. 6th International conference proceedings, ISBN 978-80-87294-55-0

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0241406

Permalink: http://www.nusl.cz/ntk/nusl-178292


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers