Original title: Application of pressurized hot water for etching of microfluidics
Authors: Vašina, M. ; Grym, Jakub ; Foret, František
Document type: Papers
Conference/Event: CECE Junior 2013, Brno (CZ), 2013-11-12 / 2013-11-13
Year: 2013
Language: eng
Abstract: The subject of this study is a new method of glass etching and its application in microfluidics. Commonly, hydrofluoric acid is used for glass etching. In this study we have tested a new method of glass etching using pressurized hot water. Test motives were prepared using photolitography and metal sputtering on the glass substrate and the etching was performed in a newly developed device capable to compress and heat water to its critical point. Electron microscopy and profilometry have been used for analyzing the surface of the etched glass substrate.
Keywords: microfluidics; pressurized hot water
Host item entry: Chemické Listy. Roč. 107, Issue s3., ISSN 0009-2770

Institution: Institute of Analytical Chemistry AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0240941

Permalink: http://www.nusl.cz/ntk/nusl-178204


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Research > Institutes ASCR > Institute of Analytical Chemistry
Conference materials > Papers