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Original title:
Microstructural characterization of metallic materials using advanced SEM techniques
Authors: Piňos, Jakub ; Konvalina, Ivo ; Kasl, J. ; Jandová, D. ; Mikmeková, Šárka
Document type: Papers
Conference/Event: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Year: 2014
Language: eng
Abstract: The development of advanced materials is inseparably connected with detailed knowledge of the relationship between microstructure and mechanical properties. Traditional high-voltage scanning electron microscopy (SEM) is one of the most commonly used techniques for microstructure analysis, though it may be insufficient particularly for the characterization of advanced materials exhibiting a complex microstructure. The benefits of using slow electrons have been described in several articles. Experiments have been performed with a XHR SEM Magellan 400L (FEI Company) equipped with two detectors for secondary electrons (SE), an Everhart Thornley detector and an in-lens TLD detector, and solid-state BSE detector (CBS) located below the pole piece. This microscope can also be operated in the beam deceleration (BD) mode. The field of the BD not only decelerates the primary electrons, but also accelerates the emitted (signal) electrons towards the detector. Furthermore, high-angle backscattered electrons (BSE) are also collimated towards the optical axis and are detected. These electrons carry, first and foremost, crystal orientation contrast. SE and low-angle BSE can be detected by the TLD detector located inside the objective lens. Angle-resolved detection of BSE is performed using a CBS detector divided into four concentric segments.
Keywords: low voltage microscopy; SEM; SLEEM
Project no.: TE01020118 (CEP)
Funding provider: GA TA ČR
Host item entry: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238245
Permalink: http://www.nusl.cz/ntk/nusl-177531
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Piňos, Jakub ; Konvalina, Ivo ; Kasl, J. ; Jandová, D. ; Mikmeková, Šárka
Document type: Papers
Conference/Event: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Year: 2014
Language: eng
Abstract: The development of advanced materials is inseparably connected with detailed knowledge of the relationship between microstructure and mechanical properties. Traditional high-voltage scanning electron microscopy (SEM) is one of the most commonly used techniques for microstructure analysis, though it may be insufficient particularly for the characterization of advanced materials exhibiting a complex microstructure. The benefits of using slow electrons have been described in several articles. Experiments have been performed with a XHR SEM Magellan 400L (FEI Company) equipped with two detectors for secondary electrons (SE), an Everhart Thornley detector and an in-lens TLD detector, and solid-state BSE detector (CBS) located below the pole piece. This microscope can also be operated in the beam deceleration (BD) mode. The field of the BD not only decelerates the primary electrons, but also accelerates the emitted (signal) electrons towards the detector. Furthermore, high-angle backscattered electrons (BSE) are also collimated towards the optical axis and are detected. These electrons carry, first and foremost, crystal orientation contrast. SE and low-angle BSE can be detected by the TLD detector located inside the objective lens. Angle-resolved detection of BSE is performed using a CBS detector divided into four concentric segments.
Keywords: low voltage microscopy; SEM; SLEEM
Project no.: TE01020118 (CEP)
Funding provider: GA TA ČR
Host item entry: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238245
Permalink: http://www.nusl.cz/ntk/nusl-177531
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2014-11-13, last modified 2021-11-24