Název:
Performance of YAG:Ce Scintillators for Low-Energy Electron Detectors in S(T)EM
Autoři:
Lalinský, Ondřej ; Bok, Jan ; Schauer, Petr ; Frank, Luděk Typ dokumentu: Příspěvky z konference Konference/Akce: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Rok:
2014
Jazyk:
eng
Abstrakt: Cerium activated single crystals of yttrium aluminium garnet (YAG:Ce) Y3-xCexAl5O12 are widely used as scintillators in electron detectors for S(T)EM. Nowadays, it is sometimes necessary to detect low-energy electrons without post-acceleration. In such cases, extremely sensitive detectors are required that are able to detect even electrons with energies of only hundreds of eV while avoiding charging of the scintillator surface. However, commonly used scintillators strongly lose their light yield with the decrease of the incident electron energy. Moreover, a thinner conductive layer on the scintillator surface has to be used to allow low-energy electrons to pass through. Possible charging of the surface negatively affects its cathodoluminescence (CL) light yield. The low-energy electron excitation takes place closer to the scintillator surface where damage can be expected owing to its preparation, which also reduces the CL light yield. The aim was to study the influence of the scintillator and its conductive layer on the low-energy electron detection efficiency.
Klíčová slova:
cathodoluminescence; electron detector; low-energy electron; scintillator; SEM; single crystal; STEM; YAG:Ce Číslo projektu: TE01020118 (CEP), EE.2.3.20.0103 Poskytovatel projektu: GA TA ČR, GA MŠk Zdrojový dokument: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0238244