Original title: Innovation possibilities of scintillation electron detector for SEM
Authors: Schauer, Petr ; Bok, Jan
Document type: Papers
Conference/Event: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Year: 2014
Language: eng
Abstract: To evaluate performance of a scintillation detection system for SEM, it is necessary to consider many scintillator parameters. Various attributes of the scintillator for the SEM electron detector are listed in. The very important parameters are those affecting the detective quantum efficiency (DQE) which is primarily a measure of image noise. Not a less important indicator of image quality is the modulation transfer function (MTF) which describes the ability to show fine image details. Therefore, using a scanning imaging system, the detector bandwidth, which is given especially by the scintillator decay time, is the key to the good MTF. Currently, the YAG:Ce single crystal scintillator (introduced already in 1978 having somewhat limiting decay characteristic is the most frequently used scintillator in the SEM. The aim of this paper is to outline possibilities of scintillator innovation to get the improved MTF and DQE.
Keywords: cathodoluminescence; DQE; electron detector; MTF; scintillator; SEM; single crystal
Project no.: TE01020118 (CEP), EE.2.3.20.0103
Funding provider: GA TA ČR, GA MŠk
Host item entry: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238242

Permalink: http://www.nusl.cz/ntk/nusl-177528


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