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Název:
Determination of drift distortion in SEM micrographs acquired at different magnifications and acquisition times
Autoři: Petráňová, Veronika ; Koudelka_ml., Petr ; Valach, Jaroslav
Typ dokumentu: Příspěvky z konference
Konference/Akce: Youth symposium on experimental solid mechanics /13./, Děčín (CZ), 2014-06-29 / 2014-07-02
Rok: 2014
Jazyk: eng
Abstrakt: In the experimental mechanics wide variety of optical methods including measurement of deformation at reduced length scales using combination of computer vision and scanning electron microscopy (SEM) have been recently applied. One of suitable methods for in-plane measurement of displacements and deformations in the micrographs obtained by SEM is the 2D digital image correlation. In contrast to images obtained in visible spectrum by classical optical devices temporally-varying distortions known as drift distortion are present in the SEM micrographs. These distortions are caused by positional errors of electron beam during scanning process. Magnitude of this effect decreases with higher conductivity of the sample and is also influenced by magnification and scanning time. For this purpose measurement of distortion was performed on a series of micrographs of conductive samples acquired at different magnifications and acquisition times. Surface of each sample was covered with liquid silver to ensure adequate contrast pattern necessary for determination of distortion’s magnitude and distortion magnitudes were assessed.
Klíčová slova: digital image correlation; drift distortion; scanning electron microscopy
Číslo projektu: GBP105/12/G059 (CEP)
Poskytovatel projektu: GA ČR
Zdrojový dokument: Proceedings of XIIIth youth symposium on experimental solid mechanics, ISBN 978-80-01-05556-4
Instituce: Ústav teoretické a aplikované mechaniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný na externích webových stránkách.
Externí umístění souboru: http://www.itam.cas.cz/ysesm2014/proceedings/id_2_ysesm2014_proceedings.pdf
Původní záznam: http://hdl.handle.net/11104/0237205
Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-175722
Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav teoretické a aplikované mechaniky
Konferenční materiály > Příspěvky z konference
Autoři: Petráňová, Veronika ; Koudelka_ml., Petr ; Valach, Jaroslav
Typ dokumentu: Příspěvky z konference
Konference/Akce: Youth symposium on experimental solid mechanics /13./, Děčín (CZ), 2014-06-29 / 2014-07-02
Rok: 2014
Jazyk: eng
Abstrakt: In the experimental mechanics wide variety of optical methods including measurement of deformation at reduced length scales using combination of computer vision and scanning electron microscopy (SEM) have been recently applied. One of suitable methods for in-plane measurement of displacements and deformations in the micrographs obtained by SEM is the 2D digital image correlation. In contrast to images obtained in visible spectrum by classical optical devices temporally-varying distortions known as drift distortion are present in the SEM micrographs. These distortions are caused by positional errors of electron beam during scanning process. Magnitude of this effect decreases with higher conductivity of the sample and is also influenced by magnification and scanning time. For this purpose measurement of distortion was performed on a series of micrographs of conductive samples acquired at different magnifications and acquisition times. Surface of each sample was covered with liquid silver to ensure adequate contrast pattern necessary for determination of distortion’s magnitude and distortion magnitudes were assessed.
Klíčová slova: digital image correlation; drift distortion; scanning electron microscopy
Číslo projektu: GBP105/12/G059 (CEP)
Poskytovatel projektu: GA ČR
Zdrojový dokument: Proceedings of XIIIth youth symposium on experimental solid mechanics, ISBN 978-80-01-05556-4
Instituce: Ústav teoretické a aplikované mechaniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný na externích webových stránkách.
Externí umístění souboru: http://www.itam.cas.cz/ysesm2014/proceedings/id_2_ysesm2014_proceedings.pdf
Původní záznam: http://hdl.handle.net/11104/0237205
Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-175722
Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav teoretické a aplikované mechaniky
Konferenční materiály > Příspěvky z konference
Záznam vytvořen dne 2014-10-23, naposledy upraven 2023-12-06.