Original title: History of Electron Microscopy at the Institute of Scientific Instruments
Authors: Müllerová, Ilona
Document type: Papers
Conference/Event: Workshop of Interesting Topics of SEM and ESEM, Mikulov (CZ), 2014-08-26 / 2014-08-31
Year: 2014
Language: eng
Abstract: The development of the first transmission electron microscope (EM) at the Institute of Scientific Instruments (ISI) was completed in 1951. In 1954 a functional model of a desktop EM (the Tesla BS 242) was built and it won the Gold Medal at EXPO 1958. Over 1000 of these instruments were produced over a period of 20 years and exported to 20 countries. Unique transmission, emission and scanning EMs were developed and built during the 1960s. At the same time, the issues with high voltage sources, vacuum (and subsequently ultrahigh vacuum) and with the analysis of residual gases were resolved. In 1962, the first electron interference experiments in the world were carried out at ISI. Non-conventional forms of EM were also developed in the 1970s, e.g. interference shadow EM, Lorentz and tunneling EM, emission microscopy, as well as low energy electron diffraction [1]. Since 1973 the finite element method has been exploited for the computation of electrostatic and magnetic lenses. The ultrahigh vacuum scanning EM with cold field emission gun and an Auger spectrometer was fully developed and built at ISI in 1976, and the electron beam writer with a shaped beam and field emission gun in 1985. The development of new scintillation and cathodoluminescent screens began in the 1970s and our single crystal Yttrium Aluminium Garnet detector significantly improved detection systems all over the world. Low- and very-low-energy scanning EM was introduced to the world in 1990 as a unique technique. Today, it can achieve resolution as low as 4.5 nm at the incident electron energy of 20 eV.
Keywords: history of electron microscopy; Institute of Scientific Instruments
Project no.: EE.2.3.20.0103
Funding provider: GA MŠk
Host item entry: Workshop of Interesting Topics of SEM and ESEM, ISBN 978-80-87441-12-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0235962

Permalink: http://www.nusl.cz/ntk/nusl-174991


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Research > Institutes ASCR > Institute of Scientific Instruments
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