Original title: Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems
Authors: Domonkos, Mária ; Ižák, Tibor ; Štolcová, L. ; Proška, J. ; Kromka, Alexander
Document type: Papers
Conference/Event: International Conference NANOCON 2013 /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Year: 2013
Language: eng
Abstract: In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). The process conditions were controlled by varying radiofrequency (RF) power, gas mixture (O2:CF4 ratio) and process duration.
Keywords: Langmuir-Blodgett monolayers; nanosphere lithography; polystyrene microspheres; pulsed linear-antenna microwave plasma; reactive ion etching
Project no.: GAP108/12/0910 (CEP)
Funding provider: GA ČR
Host item entry: NANOCON 2013 Conference Proceedings, ISBN 978-80-87294-44-4

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at external website.
External URL: http://www.nanocon.eu/files/proceedings/14/reports/2086.pdf
Original record: http://hdl.handle.net/11104/0231560

Permalink: http://www.nusl.cz/ntk/nusl-170501


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Research > Institutes ASCR > Institute of Physics
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