Název:
Photonometers for coating and sputtering machines
Autoři:
Oupický, Pavel ; Jareš, Daniel ; Václavík, Jan ; Vápenka, David Typ dokumentu: Příspěvky z konference Konference/Akce: OaM 2012 International Conference on Optics and Measurement, Liberec (CZ), 2012-10-16 / 2012-10-18
Rok:
2012
Jazyk:
eng
Abstrakt: The concept of photonometers (alternative name of optical monitor of a vacuum deposition process)for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.
Klíčová slova:
photonometers Číslo projektu: ED2.1.00/03.0079 Poskytovatel projektu: GA MŠk Zdrojový dokument: OaM/ 2012/ Optics and Measurement International Conference. Conference Proceedings, ISBN 978-80-87026-02-1
Instituce: Ústav fyziky plazmatu AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0230678