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Original title:
Nanopositioning with detection of a standing wave
Authors: Holá, Miroslava ; Hrabina, Jan ; Číp, Ondřej ; Fejfar, A. ; Stuchlík, J. ; Kočka, J. ; Oulehla, Jindřich ; Lazar, Josef
Document type: Papers
Conference/Event: NANOCON 2013. International Conference /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Year: 2013
Language: eng
Abstract: A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
Keywords: Fabry-Perot cavity; Interferometry; Nanometrology; Nanopositioning; Standing wave
Project no.: GPP102/11/P820 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, EE2.4.31.0016
Funding provider: GA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: NANOCON 2013. 5th International Conference Proceedings, ISBN 978-80-87294-44-4
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225472
Permalink: http://www.nusl.cz/ntk/nusl-161374
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Holá, Miroslava ; Hrabina, Jan ; Číp, Ondřej ; Fejfar, A. ; Stuchlík, J. ; Kočka, J. ; Oulehla, Jindřich ; Lazar, Josef
Document type: Papers
Conference/Event: NANOCON 2013. International Conference /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Year: 2013
Language: eng
Abstract: A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
Keywords: Fabry-Perot cavity; Interferometry; Nanometrology; Nanopositioning; Standing wave
Project no.: GPP102/11/P820 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, EE2.4.31.0016
Funding provider: GA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: NANOCON 2013. 5th International Conference Proceedings, ISBN 978-80-87294-44-4
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225472
Permalink: http://www.nusl.cz/ntk/nusl-161374
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-11-05, last modified 2021-11-24