Název:
Nanopositioning with detection of a standing wave
Autoři:
Holá, Miroslava ; Hrabina, Jan ; Číp, Ondřej ; Fejfar, A. ; Stuchlík, J. ; Kočka, J. ; Oulehla, Jindřich ; Lazar, Josef Typ dokumentu: Příspěvky z konference Konference/Akce: NANOCON 2013. International Conference /5./, Brno (CZ), 2013-10-16 / 2013-10-18
Rok:
2013
Jazyk:
eng
Abstrakt: A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
Klíčová slova:
Fabry-Perot cavity; Interferometry; Nanometrology; Nanopositioning; Standing wave Číslo projektu: GPP102/11/P820 (CEP), TA02010711 (CEP), TE01020233 (CEP), ED0017/01/01, EE2.4.31.0016 Poskytovatel projektu: GA ČR, GA TA ČR, GA TA ČR, GA MŠk, GA MŠk Zdrojový dokument: NANOCON 2013. 5th International Conference Proceedings, ISBN 978-80-87294-44-4
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0225472