Original title: Analysis of electron current instability in E-beam writer
Authors: Bok, Jan ; Horáček, Miroslav ; Král, Stanislav ; Kolařík, Vladimír ; Matějka, František
Document type: Papers
Conference/Event: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Year: 2012
Language: eng
Abstract: The electron beam writer Tesla BS600 works with a thermal-field electron emitter, fixed electron energy of 15 keV and a rectangular shaped variable-size electron beam. The size of the shaped beam (stamp) can be set from 50 to 6300 nm in standard mode and from 16 to 2100 nm in high-resolution mode. The basic increment of the stamp size is 50 nm, resp. 16 nm. Electron current density inhomogeneity and long-term instability in stamps can have negative impact on the exposure quality. Therefore, we focused on a study of the current time instability. The current density in variously sized stamps was measured by a picoammeter and a PIN diode video channel as a function of time. We analyzed short-term and long-term current instabilities using filtering techniques, as well as the Fourier analysis. Based on the results, we could be able to find reasons of the current instabilities and to propose improvements to achieve higher exposure quality.
Keywords: current drift and noise; current measurement; electron beam; fourier analysis
Project no.: ED0017/01/01, TE01020118 (CEP), FR-TI1/576 (CEP)
Funding provider: GA MŠk, GA TA ČR, GA MPO
Host item entry: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0219831

Permalink: http://www.nusl.cz/ntk/nusl-151685


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