Název:
Analysis of electron current instability in E-beam writer
Autoři:
Bok, Jan ; Horáček, Miroslav ; Král, Stanislav ; Kolařík, Vladimír ; Matějka, František Typ dokumentu: Příspěvky z konference Konference/Akce: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Rok:
2012
Jazyk:
eng
Abstrakt: The electron beam writer Tesla BS600 works with a thermal-field electron emitter, fixed electron energy of 15 keV and a rectangular shaped variable-size electron beam. The size of the shaped beam (stamp) can be set from 50 to 6300 nm in standard mode and from 16 to 2100 nm in high-resolution mode. The basic increment of the stamp size is 50 nm, resp. 16 nm. Electron current density inhomogeneity and long-term instability in stamps can have negative impact on the exposure quality. Therefore, we focused on a study of the current time instability. The current density in variously sized stamps was measured by a picoammeter and a PIN diode video channel as a function of time. We analyzed short-term and long-term current instabilities using filtering techniques, as well as the Fourier analysis. Based on the results, we could be able to find reasons of the current instabilities and to propose improvements to achieve higher exposure quality.
Klíčová slova:
current drift and noise; current measurement; electron beam; fourier analysis Číslo projektu: ED0017/01/01, TE01020118 (CEP), FR-TI1/576 (CEP) Poskytovatel projektu: GA MŠk, GA TA ČR, GA MPO Zdrojový dokument: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0219831