Original title: Structuring of diamond films by reactive ion plasma etching
Authors: Domonkos, M. ; Ižák, Tibor ; Proška, J. ; Kromka, Alexander
Document type: Papers
Conference/Event: Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012), Praha (CZ), 2012-09-11 / 2012-09-11
Year: 2012
Language: eng
Abstract: In this study, two common strategies of diamond film structuring are described. Main focus is on the comparison of top-down and the bottom-up strategies. The top-down strategy is primary related to dry reactive ion etching through masking materials (or even without mask), while bottom-up strategy is based on selective area deposition of diamond film. Several methods of both strategies are demonstrated in details in the article, regarding to their properties and basic principles.
Keywords: diamond thin films; nanostructuring; reactive ion etching; scanning electron microscopy
Project no.: CEZ:AV0Z10100521 (CEP), GAP108/12/0910 (CEP), GAP108/11/0794 (CEP), IAAX00100902 (CEP)
Funding provider: GA ČR, GA ČR, GA AV ČR
Host item entry: Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012), ISBN 978-80-01-05132-0

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0218280

Permalink: http://www.nusl.cz/ntk/nusl-151626


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers