Original title: Thin Metallic Layers Structured by E-beam Lithography
Authors: Horáček, Miroslav ; Kolařík, Vladimír ; Urbánek, Michal ; Matějka, František ; Matějka, Milan
Document type: Papers
Conference/Event: METAL 2012. International Conference on Metallurgy and Materials /21./, Brno (CZ), 2012-05-23 / 2012-05-25
Year: 2012
Language: eng
Abstract: The group of electron beam lithography runs the laboratory equipped with a shaped beam electron writer (BS600) and the basic technology for the lithographic process. The group is able to prepare micro and nano structures in thin layers of metals and other materials; including the characterization of the realized structures (using AFM, SEM, and CLSM). Within a few months (in the frame of the 'ALISI' project) a new e-beam writer with a better resolution will be installed; it will enable the realization of the actual structures in a better quality and the development of new structures with a very high innovation potential.
Keywords: E-beam lithography; micro structures; shaped electron beam; thin metallic layers
Project no.: ED0017/01/01
Funding provider: GA MŠk
Host item entry: METAL 2012 Conference Proceedings. 21st International Conference on Metallurgy and Materials, ISBN 978-80-87294-29-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0216599

Permalink: http://www.nusl.cz/ntk/nusl-136072


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers