Název:
Thin Metallic Layers Structured by E-beam Lithography
Autoři:
Horáček, Miroslav ; Kolařík, Vladimír ; Urbánek, Michal ; Matějka, František ; Matějka, Milan Typ dokumentu: Příspěvky z konference Konference/Akce: METAL 2012. International Conference on Metallurgy and Materials /21./, Brno (CZ), 2012-05-23 / 2012-05-25
Rok:
2012
Jazyk:
eng
Abstrakt: The group of electron beam lithography runs the laboratory equipped with a shaped beam electron writer (BS600) and the basic technology for the lithographic process. The group is able to prepare micro and nano structures in thin layers of metals and other materials; including the characterization of the realized structures (using AFM, SEM, and CLSM). Within a few months (in the frame of the 'ALISI' project) a new e-beam writer with a better resolution will be installed; it will enable the realization of the actual structures in a better quality and the development of new structures with a very high innovation potential.
Klíčová slova:
E-beam lithography; micro structures; shaped electron beam; thin metallic layers Číslo projektu: ED0017/01/01 Poskytovatel projektu: GA MŠk Zdrojový dokument: METAL 2012 Conference Proceedings. 21st International Conference on Metallurgy and Materials, ISBN 978-80-87294-29-1
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0216599