Original title: Education and research at clean room laboratory for silicon device technology at Masaryk University
Authors: Mikulík, P. ; Humlíček, J. ; Hovorka, Miloš ; Kulha, P. ; Kadlec, F.
Document type: Papers
Conference/Event: Physics at Nanoscale. IUVSTA International Summer School /10./, Devět skal (CZ), 2012-05-30 / 2012-06-04
Year: 2012
Language: eng
Abstract: Masaryk University is operating a clean room laboratory for silicon device technology since April 2007. The laboratory has been designed in partnership with ON Semiconductor Czech Republic. The University covered the construction costs and the company provided guidance during zhe design and construction of the clean rooms and managed supply, installation and start-up of the technology equipment.
Keywords: clean room laboratory; education and research; silicon device technology
Host item entry: Physic and Nanoscale. (Proceedings of the 10th IUVSTA International Summer School ), ISBN 978-80-260-0619-0

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215746

Permalink: http://www.nusl.cz/ntk/nusl-136012


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers