Název:
Calculation of difraction aberration using differential algebra
Autoři:
Radlička, Tomáš Typ dokumentu: Příspěvky z konference Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Rok:
2012
Jazyk:
eng
Abstrakt: The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture.
Klíčová slova:
diferential algebra method; Diffraction in electron optics Zdrojový dokument: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0215697