Original title: Surface crystallinity at the sight of electrons
Authors: Frank, Luděk ; Mikmeková, Šárka ; Mika, Filip ; Müllerová, Ilona
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: Scattering of electrons, injected into solids in order to produce an electron optical image of their surfaces, is governed by inner potentional of the sample with its spatial distribution inherent to the target structure. Except truly amorphous materials of the spatial arrangement range shorter than the interaction volume of electrons, we meet anisotropic scattering with the resulting image signal responding to the local crystalline structure. Incident electrons undergo scattering events the number of wich depends on their energy and on the scattering cross section of the material and the final emitted current results from statistics of these events.
Keywords: backstattered electrons; crystal structure; scanning electron microscopy
Project no.: GAP108/11/2270 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215688

Permalink: http://www.nusl.cz/ntk/nusl-135993


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers