Original title: Electron beam cutting of non-metals
Authors: Dupák, Libor
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: Various materials are difficult to cut or drill, e.g. due to their mechanical properties (hardness, fragility). Also, sometimes the required hole shape and dimensions may be difficult to obtain by mechanical machining or the efficiency of such process is low. Electron beam machining is one way to overcome these issue. It is based on the melting and evaporation of the material by the intense electron beam. The presented experiments were performed on the desktop electron beam welder MEBW-60/2, developed at the Institute of Scientific Instruments AS CR, v.v.i. at Brno. It is also manufactured and sold by the Focus GmbH company under licence. In the following experiments, several sets of grooves were prepared, both in quartz glass and AI2O3 ceramics, to find out the influence of various beam parameters on groove dimensions. The experimental conditions were as follows: acceleration voltage 50 kV, beam current 0.1-1 mA, machining speed 2.5-50 mnvs'1.
Keywords: cutting of non-metals; electron beam
Project no.: EE.2.3.20.0103
Funding provider: GA MŠk
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215687

Permalink: http://www.nusl.cz/ntk/nusl-135992


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Research > Institutes ASCR > Institute of Scientific Instruments
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