Original title: Measurements of current density distribution in e-beam writer
Authors: Bok, Jan ; Kolařík, Vladimír
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: An e-beam writer with a variable shaped beam needs a bright and stable source of electrons but also a homogeneous square beam segment. This is the starting element out oif wich smaller rectangular-shaped variable-sized patterns are selected (stamps). Current inhomogeneity of the starting element would cause and different current density of various stamps that negatively impacts the exposure quality. This problem implies the necessity of analysing and monitoring the current density distribution in the staring beam element.
Keywords: e-beam writer; measurement of current density
Project no.: ED0017/01/01, FR-TI1/576 (CEP)
Funding provider: GA MŠk, GA MPO
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215682

Permalink: http://www.nusl.cz/ntk/nusl-135990


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers