Název: Scanning Probe Microscopy: Measuring on Hard Surfaces
Autoři: Matějka, Milan ; Urbánek, Michal ; Kolařík, Vladimír
Typ dokumentu: Příspěvky z konference
Konference/Akce: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Rok: 2011
Jazyk: eng
Abstrakt: During a measurement by scanning probe microscopy (SPM) an image artifacts can appear in a measurement data. The source of image artifacts during an SPM measurement could be in parts of the SPM tool: mechanical system, piezoelectric crystal, scanner electronic. However, the main source of image artifact is the probe tip geometry and properties of the sample. For example, probe wearing, which occurs during the contact measurement on a sample with a hard surface, could result in heavy probe shape change, causing probe-related image artifacts. Measurement could appear problematic on a sample with periodical relief structure (e.g. gratings with sub 10 μm periodicity) prepared in hard materials (e.g. silicon), when the structure height is greater than about 500 nm. In this case, probe can easily get struck during the scanning, on the hard surface as well as at the high aspect ratio relief structure, causing image artifact thus reducing measurement quality.
Klíčová slova: atomic force microscopy; hard surface samples measuring; image artifacts; polymer coatings; scanning probe microscopy
Číslo projektu: CEZ:AV0Z20650511 (CEP), FR-TI1/576 (CEP), ED0017/01/01
Poskytovatel projektu: GA MPO, GA MŠk
Zdrojový dokument: NANOCON 2011. 3rd International Conference, ISBN 978-80-87294-27-7

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0208052

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-109896


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference