Original title: SPM Nanoscratching in the Sub 100 nm Resolution
Authors: Urbánek, Michal ; Kolařík, Vladimír ; Matějka, Milan
Document type: Papers
Conference/Event: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Year: 2011
Language: eng
Abstract: Scanning probe microscopy (SPM) is tool basically used for surface characterization. Besides that, it offers several lithographic methods (e.g. nanoscratching) to prepare structures in the sub 100 nm resolution. The nanoscratching using SPM offers a method for patterning of surface with a very high resolution based on near field interaction. By this method some tiny marks or taggants could be prepared. Therefore we used the SPM nanoscratching for preparation of nanostructures in thin soft polymer films by various tips. Nanoscratching regime of SPM is possible to operate in contact and close contact modes. In the contact mode we prepared an array of stamps with a variable size, where dimensions and depth dependency on number of pixels were inspected. For writing of these structures we used polymer films with different softness (e.g. PMMA, SU-8) and various values of setpoint, which are responsible for structures deepness.
Keywords: nanoscratching; SPM microscopy
Project no.: CEZ:AV0Z20650511 (CEP), FR-TI1/576 (CEP), ED0017/01/01
Funding provider: GA MPO, GA MŠk
Host item entry: NANOCON 2011. 3rd International Conference, ISBN 978-80-87294-27-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0208051

Permalink: http://www.nusl.cz/ntk/nusl-109895


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