Název: Functional Tungsten-based thin films and their characterization
Autoři: Košelová, Zuzana ; Horáková, L. ; Sobola, Dinara ; Burda, Daniel ; Knápek, Alexandr ; Fohlerová, Z.
Typ dokumentu: Příspěvky z konference
Konference/Akce: METAL 2023. International Conference on Metallurgy and Materials /32./, Brno (CZ), 20230517
Rok: 2024
Jazyk: eng
Abstrakt: Anodizing is a technique by which thin oxide layers can be formed on a surface. Thin oxide layers have been found to be useful in a variety of applications, including emitters of electrons. Tungsten is still a common choice for cold field emitters in commercial microscopy applications. Its suitable quality can be further improved by thin film deposition. Not only the emission characteristic can be improved, but also the emitter operating time can be extended. Tungsten oxide is known for its excellent resistance to corrosion and chemical attack due to its stable crystal structure and strong chemical bonds between tungsten and oxygen atoms. Many techniques with different advantages and disadvantages have been used for this purpose. Anodization was chosen for this work because of the controllable uniform coverage of the material and its easy availability without the need for expensive complex equipment. The anodizing process involves applying an electrical potential to tungsten while it is immersed in an electrolyte solution. This creates a thin layer of tungsten oxide on the surface of the metal. The thickness and properties of the resulting oxide layer can be controlled by adjusting the anodization conditions, such as the electrolyte solution, voltage, and the duration of the process. In this work, H3PO4 was used as the electrolyte to test whether these tungsten oxide layers would be useful for electron emitters, for use in electron guns and other devices that require high-quality electron emitters. The properties were evaluated using appropriate techniques. In general, anodization of tungsten to form thin layers of tungsten oxide layers is a promising technique for producing high quality electron emitters.
Klíčová slova: anodization; cold-field emission; resonance enhanced tunneling; thin layer deposition; tungsten oxide
Zdrojový dokument: METAL 2023. 32nd International Conference on Metallurgy and Materials. Conference Proceedings, ISBN 978-80-88365-12-9, ISSN 2694-9296
Poznámka: Související webová stránka: https://www.confer.cz/metal/2023/4719-functional-tungsten-based-thin-films-and-their-characterization

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: https://hdl.handle.net/11104/0351063

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-541153


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference
 Záznam vytvořen dne 2024-02-25, naposledy upraven 2024-02-25.


Není přiložen dokument
  • Exportovat ve formátu DC, NUŠL, RIS
  • Sdílet