Original title: SMV-2019-03: Tenké membrány
Translated title: SMV-2019-03: Thin membranes
Authors: Krátký, Stanislav ; Matějka, Milan ; Chlumská, Jana ; Horáček, Miroslav ; Kolařík, Vladimír ; Meluzín, Petr ; Král, Stanislav
Document type: Research reports
Year: 2019
Language: cze
Abstract: [cze] [eng]

Keywords: e-beam lithography; plasma etching; reactive ion etching; wet etching

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0302493

Permalink: http://www.nusl.cz/ntk/nusl-408004


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2019-12-09, last modified 2020-03-27


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